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- Kim, Taesung
- Microfluidics & Nanomechatronics Lab.
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| DC Field | Value | Language |
|---|---|---|
| dc.citation.conferencePlace | KO | - |
| dc.citation.title | 제18회 KMEMS 학술대회 | - |
| dc.contributor.author | 김동주 | - |
| dc.contributor.author | 하도경 | - |
| dc.contributor.author | 김태성 | - |
| dc.date.accessioned | 2023-12-19T21:07:07Z | - |
| dc.date.available | 2023-12-19T21:07:07Z | - |
| dc.date.created | 2017-01-02 | - |
| dc.date.issued | 2016-04-08 | - |
| dc.identifier.bibliographicCitation | 제18회 KMEMS 학술대회 | - |
| dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/39982 | - |
| dc.language | 한국어 | - |
| dc.publisher | 마이크로나노시스템학회 | - |
| dc.title.alternative | 크랙-포토리소그래피를 이용하여 SU-8 필름에 형성된 나노패턴의 열처리 조건에 따른 구조 변화 | - |
| dc.title | Geometrical evaluation of crack-lithography assisted nanopatterns on SU-8 film by annealing conditions | - |
| dc.type | Conference Paper | - |
| dc.date.conferenceDate | 2016-04-07 | - |
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