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DC Field | Value | Language |
---|---|---|
dc.citation.endPage | 1033 | - |
dc.citation.number | 5917 | - |
dc.citation.startPage | 1030 | - |
dc.citation.title | SCIENCE | - |
dc.citation.volume | 323 | - |
dc.contributor.author | Park, Soojin | - |
dc.contributor.author | Lee, Dong Hyun | - |
dc.contributor.author | Xu, Ji | - |
dc.contributor.author | Kim, Bokyung | - |
dc.contributor.author | Hong, Sung Woo | - |
dc.contributor.author | Jeong, Unyong | - |
dc.contributor.author | Xu, Ting | - |
dc.contributor.author | Russell, Thomas P. | - |
dc.date.accessioned | 2023-12-22T08:10:13Z | - |
dc.date.available | 2023-12-22T08:10:13Z | - |
dc.date.created | 2013-07-18 | - |
dc.date.issued | 2009-02 | - |
dc.description.abstract | Generating laterally ordered, ultradense, macroscopic arrays of nanoscopic elements will revolutionize the microelectronic and storage industries. We used faceted surfaces of commercially available sapphire wafers to guide the self- assembly of block copolymer microdomains into oriented arrays with quasi- long- range crystalline order over arbitrarily large wafer surfaces. Ordered arrays of cylindrical microdomains 3 nanometers in diameter, with areal densities in excess of 10 terabits per square inch, were produced. The sawtoothed substrate topography provides directional guidance to the self- assembly of the block copolymer, which is tolerant of surface defects, such as dislocations. The lateral ordering and lattice orientation of the single- grain arrays of microdomains are maintained over the entire surface. The approach described is parallel, applicable to different substrates and block copolymers, and opens a versatile route toward ultrahigh- density systems. | - |
dc.identifier.bibliographicCitation | SCIENCE, v.323, no.5917, pp.1030 - 1033 | - |
dc.identifier.doi | 10.1126/science.1168108 | - |
dc.identifier.issn | 0036-8075 | - |
dc.identifier.scopusid | 2-s2.0-60749101893 | - |
dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/3854 | - |
dc.identifier.url | http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=60749101893 | - |
dc.identifier.wosid | 000263478400033 | - |
dc.language | 영어 | - |
dc.publisher | AMER ASSOC ADVANCEMENT SCIENCE | - |
dc.title | Macroscopic 10-Terabit-per-Square- Inch Arrays from Block Copolymers with Lateral Order | - |
dc.type | Article | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | BOTTOM-UP | - |
dc.subject.keywordPlus | LITHOGRAPHY | - |
dc.subject.keywordPlus | GRAPHOEPITAXY | - |
dc.subject.keywordPlus | TEMPLATES | - |
dc.subject.keywordPlus | SURFACES | - |
dc.subject.keywordPlus | ROUTE | - |
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