dc.citation.conferencePlace |
SP |
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dc.citation.conferencePlace |
Barcelona |
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dc.citation.endPage |
2081 |
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dc.citation.startPage |
2079 |
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dc.citation.title |
2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 |
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dc.contributor.author |
Heo, Jeongil |
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dc.contributor.author |
Lim, Yeongjin |
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dc.contributor.author |
Shin, Heungjoo |
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dc.date.accessioned |
2023-12-20T01:06:13Z |
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dc.date.available |
2023-12-20T01:06:13Z |
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dc.date.created |
2013-07-17 |
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dc.date.issued |
2013-06-16 |
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dc.description.abstract |
We introduce a hydrogen gas sensor based on a suspended monolithic carbon nanowire structure. This structure provides selective and sensitive hydrogen sensing capability and unique advantages overcoming limitation of on-plane nanostructure based sensors. The fabrication of suspended carbon nanowire consists of simple two-step conventional microfabrication processes; photolithography and pyrolysis. The monolithic structure ensures perfect ohmic contact between the nanowire and the electrical contact pads. 20 ppm of hydrogen was successfully detected by a suspended monolithic carbon nanowire (width 300 nm, thickness 600 nm, distance between the nanowire and the substrate 7.3 μm) coated wiht a 10-nm-thick palladium layer. |
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dc.identifier.bibliographicCitation |
2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, pp.2079 - 2081 |
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dc.identifier.doi |
10.1109/Transducers.2013.6627209 |
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dc.identifier.scopusid |
2-s2.0-84891724113 |
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dc.identifier.uri |
https://scholarworks.unist.ac.kr/handle/201301/35646 |
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dc.identifier.url |
https://ieeexplore.ieee.org/document/6627209 |
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dc.language |
영어 |
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dc.publisher |
2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 |
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dc.title |
Development of a hydrogen gas sensor based on a suspended monolithic carbon nanowire platform |
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dc.type |
Conference Paper |
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dc.date.conferenceDate |
2013-06-16 |
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