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- Kim, Taesung
- Microfluidics & Nanomechatronics Lab.
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| DC Field | Value | Language |
|---|---|---|
| dc.citation.conferencePlace | US | - |
| dc.citation.conferencePlace | Anchorage | - |
| dc.citation.endPage | 1369 | - |
| dc.citation.startPage | 1366 | - |
| dc.citation.title | 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 | - |
| dc.contributor.author | Kim, Minseok | - |
| dc.contributor.author | Ha, Dogyeong | - |
| dc.contributor.author | Kim, Taesung | - |
| dc.date.accessioned | 2023-12-19T22:10:39Z | - |
| dc.date.available | 2023-12-19T22:10:39Z | - |
| dc.date.created | 2015-10-26 | - |
| dc.date.issued | 2015-06-23 | - |
| dc.description.abstract | We present an innovative cracking-assisted nanofabrication technique that relies only on a standard photolithography (photoresist patterning) process. This novel technique produces arbitrary-shaped nanopatterns with well-controlled, various geometric dimensions in a large-area and high-throughput manner. In addition, we show that mixed-scale patterns fabricated using the technique can be used as a master mold for replicating numerous nanofluidic devices via soft lithography, which to the best of our knowledge has not been reported previously in material-failure-based techniques including cracking. | - |
| dc.identifier.bibliographicCitation | 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, pp.1366 - 1369 | - |
| dc.identifier.doi | 10.1109/TRANSDUCERS.2015.7181186 | - |
| dc.identifier.scopusid | 2-s2.0-84955491140 | - |
| dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/35520 | - |
| dc.identifier.url | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7181186 | - |
| dc.language | 영어 | - |
| dc.publisher | 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 | - |
| dc.title | CRACK-PHOTOLITHOGRAPHY” FOR HIGH-THROUGHPUT NANOPATTERNING AND NANOFLUIDIC APPLICATIONS | - |
| dc.type | Conference Paper | - |
| dc.date.conferenceDate | 2015-06-21 | - |
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