dc.citation.conferencePlace |
UK |
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dc.citation.conferencePlace |
Belfast |
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dc.citation.endPage |
907 |
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dc.citation.startPage |
905 |
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dc.citation.title |
31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 |
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dc.contributor.author |
Lim, Yeongjin |
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dc.contributor.author |
Lee, Seungwook |
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dc.contributor.author |
Kwon, Yeong Min |
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dc.contributor.author |
Baik, Jeong Min |
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dc.contributor.author |
Shin, Heungjoo |
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dc.date.accessioned |
2023-12-19T17:37:41Z |
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dc.date.available |
2023-12-19T17:37:41Z |
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dc.date.created |
2018-05-04 |
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dc.date.issued |
2018-01-23 |
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dc.description.abstract |
This paper reports a novel metal oxide nanowire (MOx NW) based gas senor built on a suspended carbon nanowire heater allowing ultra-low power consumption. This sensing platform was fabricated using only wafer level batch fabrication processes such as carbon-MEMS, atomic layer deposition, and hydrothermal growth processes. In addition, the suspended high-aspect-ratio geometry of the carbon nanowire enables MOx NWs to be heated with ultra-low power Joule heating. |
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dc.identifier.bibliographicCitation |
31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, pp.905 - 907 |
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dc.identifier.doi |
10.1109/MEMSYS.2018.8346703 |
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dc.identifier.issn |
1084-6999 |
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dc.identifier.scopusid |
2-s2.0-85047007154 |
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dc.identifier.uri |
https://scholarworks.unist.ac.kr/handle/201301/35225 |
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dc.identifier.url |
https://ieeexplore.ieee.org/document/8346703 |
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dc.language |
영어 |
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dc.publisher |
31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 |
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dc.title |
Gas sensor based on a metal oxide nanowire forest built on a suspended carbon nano-heater |
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dc.type |
Conference Paper |
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dc.date.conferenceDate |
2018-01-21 |
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