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Baik, Jeong Min
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dc.citation.conferencePlace UK -
dc.citation.conferencePlace Belfast -
dc.citation.endPage 907 -
dc.citation.startPage 905 -
dc.citation.title 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 -
dc.contributor.author Lim, Yeongjin -
dc.contributor.author Lee, Seungwook -
dc.contributor.author Kwon, Yeong Min -
dc.contributor.author Baik, Jeong Min -
dc.contributor.author Shin, Heungjoo -
dc.date.accessioned 2023-12-19T17:37:41Z -
dc.date.available 2023-12-19T17:37:41Z -
dc.date.created 2018-05-04 -
dc.date.issued 2018-01-23 -
dc.description.abstract This paper reports a novel metal oxide nanowire (MOx NW) based gas senor built on a suspended carbon nanowire heater allowing ultra-low power consumption. This sensing platform was fabricated using only wafer level batch fabrication processes such as carbon-MEMS, atomic layer deposition, and hydrothermal growth processes. In addition, the suspended high-aspect-ratio geometry of the carbon
nanowire enables MOx NWs to be heated with ultra-low power Joule heating.
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dc.identifier.bibliographicCitation 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, pp.905 - 907 -
dc.identifier.doi 10.1109/MEMSYS.2018.8346703 -
dc.identifier.issn 1084-6999 -
dc.identifier.scopusid 2-s2.0-85047007154 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/35225 -
dc.identifier.url https://ieeexplore.ieee.org/document/8346703 -
dc.language 영어 -
dc.publisher 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 -
dc.title Gas sensor based on a metal oxide nanowire forest built on a suspended carbon nano-heater -
dc.type Conference Paper -
dc.date.conferenceDate 2018-01-21 -

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