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dc.citation.endPage 19473 -
dc.citation.number 42 -
dc.citation.startPage 19467 -
dc.citation.title RSC ADVANCES -
dc.citation.volume 3 -
dc.contributor.author Lai, David -
dc.contributor.author Labuz, Joseph M. -
dc.contributor.author Kim, Jiwon -
dc.contributor.author Luker, Gary D. -
dc.contributor.author Shikanov, Ariella -
dc.contributor.author Takayama, Shuichi -
dc.date.accessioned 2023-12-22T03:15:12Z -
dc.date.available 2023-12-22T03:15:12Z -
dc.date.created 2013-10-28 -
dc.date.issued 2013-11 -
dc.description.abstract Photolithography of multi-level channel features in microfluidics is laborious and/or costly. Grayscale photolithography is mostly used with positive photoresists and conventional front side exposure, but the grayscale masks needed are generally costly and positive photoresists are not commonly used in microfluidic rapid prototyping. Here we introduce a simple and inexpensive alternative that uses pseudo-grayscale (pGS) photomasks in combination with backside diffused light lithography (BDLL) and the commonly used negative photoresist, SU-8. BDLL can produce smooth multi-level channels of gradually changing heights without use of true grayscale masks because of the use of diffused light. Since the exposure is done through a glass slide, the photoresist is cross-linked from the substrate side up enabling well-defined and stable structures to be fabricated from even unspun photoresist layers. In addition to providing unique structures and capabilities, the method is compatible with the "garage microfluidics" concept of creating useful tools at low cost since pGS BDLL can be performed with the use of only hot plates and a UV transilluminator: equipment commonly found in biology labs. Expensive spin coaters or collimated UV aligners are not needed. To demonstrate the applicability of pGS BDLL, a variety of weir-type cell traps were constructed with a single UV exposure to separate cancer cells (MDA-MB-231, 10-15 μm in size) from red blood cells (RBCs, 2-8 μm in size) as well as follicle clusters (40-50 μm in size) from cancer cells (MDA-MB-231, 10-15 μm in size) -
dc.identifier.bibliographicCitation RSC ADVANCES, v.3, no.42, pp.19467 - 19473 -
dc.identifier.doi 10.1039/c3ra43834a -
dc.identifier.issn 2046-2069 -
dc.identifier.scopusid 2-s2.0-84885413728 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/2791 -
dc.identifier.url http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84885413728 -
dc.identifier.wosid 000325554400035 -
dc.language 영어 -
dc.publisher ROYAL SOC CHEMISTRY -
dc.title Simple multi-level microchannel fabrication by pseudo-grayscale backside diffused light lithography -
dc.type Article -
dc.relation.journalWebOfScienceCategory Chemistry, Multidisciplinary -
dc.relation.journalResearchArea Chemistry -
dc.description.journalRegisteredClass scie -
dc.description.journalRegisteredClass scopus -

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