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Kinetic modulation of graphene growth by fluorine through spatially confined decomposition of metal fluorides

Author(s)
Liu, CanXu, XiaozhiQiu, LuWu, MuhongQiao, RuixiWang, LiWang, JinhuanNiu, JingjingLiang, JingZhou, XuZhang, ZhihongPeng, MiGao, PengWang, WenlongBai, XuedongMa, DingJiang, YingWu, XiaosongYu, DapengWang, EngeXiong, JieDing, FengLiu, Kaihui
Issued Date
2019-08
DOI
10.1038/s41557-019-0290-1
URI
https://scholarworks.unist.ac.kr/handle/201301/27224
Fulltext
https://www.nature.com/articles/s41557-019-0290-1
Citation
NATURE CHEMISTRY, v.11, no.8, pp.730 - 736
Abstract
Two-dimensional materials show a variety of promising properties, and controlling their growth is an important aspect for practical applications. To this end, active species such as hydrogen and oxygen are commonly introduced into reactors to promote the synthesis of two-dimensional materials with specific characteristics. Here, we demonstrate that fluorine can play a crucial role in tuning the growth kinetics of three representative two-dimensional materials (graphene, hexagonal boron nitride and WS2). When growing graphene by chemical vapour deposition on a copper foil, fluorine released from the decomposition of a metal fluoride placed near the copper foil greatly accelerates the growth of the graphene (up to a rate of ~200 μm s−1). Theoretical calculations show that it does so by promoting decomposition of the methane feedstock, which converts the endothermic growth process to an exothermic one. We further show that the presence of fluorine also accelerates the growth of two-dimensional hexagonal boron nitride and WS2.
Publisher
Nature Publishing Group
ISSN
1755-4330
Keyword
DOMAINSMETHANEFILMSSINGLE-CRYSTAL GRAPHENEHEXAGONAL BORON-NITRIDEEPITAXIAL-GROWTHOXYGENHETEROSTRUCTURESELECTRONICS

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