BROWSE

Related Researcher

Author's Photo

Yoo, Jung-Woo
Functional Hybrid Materials and Devices Lab(FHMDL)
Research Interests
  • Transport properties, spintronics, organic/molucular magnet, electronic, and spintronics,

ITEM VIEW & DOWNLOAD

Probing surface electronic properties of a patterned conductive STO by reactive ion etching

Cited 0 times inthomson ciCited 0 times inthomson ci
Title
Probing surface electronic properties of a patterned conductive STO by reactive ion etching
Author
Jin, Mi-JinChoe, DaeseongLee, Seung YoubPark, JungminJo, JunhyeonOh, InseonKim, Shin-IkBaek, SeungHyubJeon, CheolhoYoo, Jung-Woo
Issue Date
2019-02
Publisher
ELSEVIER SCIENCE BV
Citation
APPLIED SURFACE SCIENCE, v.466, no.1, pp.730 - 736
Abstract
SrTiO3 (STO) is a highly attractive oxide material due to its flexible tunability of electrical properties. It can be designed to exhibit a high mobility with a tunable carrier concentration by creating oxygen vacancies, or by doping with Nb or La, which substitute the Ti and Sr sites, respectively. Here we show a micro-patterned surface doping of STO by using reactive ion etching (RIE). The creation and pattering of a conductive STO surface were achieved by sequential treatments with Ar and O2 plasma. The patterned conductive surface edge was well defined as confirmed by an electrostatic force microscopy. The electronic characteristics of the RIE treated STO surface were probed by a synchrotron radiation photoemission spectroscopy, which shows the emergence of Ti3+, Ti2+, Ti1+ states and metallic states near the Fermi level. The electrical mobility of the conductive STO surface can be increased up to 12000 cm/V s with a typical sheet carrier concentration around 1013-1014 cm−2. Increasing Ar plasma time elongate the depth of the conductive surface, which reflects the change of magnetoresistance behavior at low temperature. The demonstrated control of the STO surface conductivity along with a large area and high precision patterning method can be widely used for a variety of oxide electronic and spintronic devices.
URI
https://scholarworks.unist.ac.kr/handle/201301/25038
URL
https://www.sciencedirect.com/science/article/pii/S0169433218327661
DOI
10.1016/j.apsusc.2018.10.068
ISSN
0169-4332
Appears in Collections:
MSE_Journal Papers
Files in This Item:
There are no files associated with this item.

find_unist can give you direct access to the published full text of this article. (UNISTARs only)

Show full item record

qrcode

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

MENU