A cracking-assisted micro-/nanofluidic fabrication platform for silver nanobelt arrays and nanosensors

Abstract

Nanowires (NWs) with high surface-to-volume ratio are advantageous for bio- or chemical sensor applications with high sensitivity, high selectivity, rapid response, and low power consumption. However, NWs are typically fabricated by combining several nanofabrication and even microfabrication processes, resulting in drawbacks such as high fabrication cost, extensive labor, and long processing time. Here, we show a novel NW fabrication platform based on “crack-photolithography” to produce a micro-/nanofluidic channel network. Solutions were loaded along the microchannel, while chemical synthesis was performed in the nanoslit-like nanochannels for fabricating silver nanobelts (AgNBs). In addition, the NW/NB fabrication platform not only made it possible to produce AgNBs in a repeatable, high-throughput, and low-cost manner but also allowed the simultaneous synthesis and alignment of AgNBs on a chip, eliminating the need for special micro- and/or nanofabrication equipment and dramatically reducing the processing time, labor, and cost. Finally, we demonstrated that the AgNBs can be used as chemical sensors, either as prepared or when integrated in a flexible substrate, to detect target analytes such as hydrogen peroxide.