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DC Field | Value | Language |
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dc.citation.endPage | 2196 | - |
dc.citation.number | 11 | - |
dc.citation.startPage | 2190 | - |
dc.citation.title | JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY | - |
dc.citation.volume | 22 | - |
dc.contributor.author | Lee, Seung Pyo | - |
dc.contributor.author | Lee, In Hwan | - |
dc.contributor.author | Ko, Tar Jo | - |
dc.contributor.author | Kang, Hyun-Wook | - |
dc.contributor.author | Lee, Seung-Jae | - |
dc.contributor.author | Cho, Dong-Woo | - |
dc.date.accessioned | 2023-12-22T08:15:29Z | - |
dc.date.available | 2023-12-22T08:15:29Z | - |
dc.date.created | 2016-09-25 | - |
dc.date.issued | 2008-11 | - |
dc.description.abstract | Micro-machining of a brittle material such as glass or silicon is important in micro fabrication. Particularly, micro-abrasive jet machining (μ-AJM) has become a useful technique for micro-machining of such materials. The μ-AJM process is mainly based on the erosion of a mask which protects brittle substrate against high velocity of micro-particles. Therefore, fabrication of an adequate mask is very important. Generally, for the fabrication of a mask in the μ-AJM process, a photomask based on the semi-conductor fabrication process was used. In this research a rapid mask fabrication technology has been developed for the μ-AJM. By scanning the focused UV laser beam, a micro-mask pattern was fabricated directly without photolithography process and photomask. Therefore, rapid and economic mask fabrication can be possible for the micro-abrasive jet machining. Two kinds of mask patterns were fabricated by using SU-8 and photopolymer (Watershed 11110). Using fabricated mask patterns, abrasive-jet machining of Si wafer was conducted successfully. | - |
dc.identifier.bibliographicCitation | JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, v.22, no.11, pp.2190 - 2196 | - |
dc.identifier.doi | 10.1007/s12206-008-0607-2 | - |
dc.identifier.issn | 1738-494X | - |
dc.identifier.scopusid | 2-s2.0-64949201908 | - |
dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/20483 | - |
dc.identifier.url | http://link.springer.com/article/10.1007/s12206-008-0607-2 | - |
dc.identifier.wosid | 000262698800020 | - |
dc.language | 영어 | - |
dc.publisher | KOREAN SOC MECHANICAL ENGINEERS | - |
dc.title | Development of rapid mask fabrication technology for micro-abrasive jet machining | - |
dc.type | Article | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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