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Kim, Jiyun
School of Materials Science and Engineering
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In Situ Fabrication and Actuation of Polymer Magnetic Microstructures

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Title
In Situ Fabrication and Actuation of Polymer Magnetic Microstructures
Author
Chung, Su EunKim, JiyunChoi, Sung-EunKim, Lily NariKwon, Sunghoon
Keywords
Fabrication;  magnetic materials;  microactuators;  microassembly;  photolithography
Issue Date
2011-08
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Citation
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.20, no.4, pp.785 - 787
Abstract
We demonstrate a single-exposure in situ magnetic actuator fabrication technique using magnetic nanoparticles (MNs) containing UV curable polymer in a Polydimethylsiloxane (PDMS) channel. Microstructures with a 3-D anchored cantilever as well as free-floating components are fabricated in a single step at a single site without the use of a sacrificial layer. By controlling the location of high oxygen concentration area through PDMS substrate patterning, we can create partially bound and free-floating movement-restricted structures. This allows us to create complex magnetic actuators, such as a 3-D anchored cantilever, motor type, and rail-guided magnetic actuators. The actuating performance of UV photopatterned magnetic microstructures depends on the MN concentration in photopolymer resin and magnetic field intensity. The measured translational velocity of magnetic microactuators with a 1 : 10 MN concentration is 140 mu m/s under 1400 G of magnetic field in poly(ethylene glycol) diacrylate resin. Also, we demonstrate selective magnetic actuation of heterogeneous structures composed of magnetic and nonmagnetic parts self-assembled in railed microfluidic channels. Only magnetic parts from the assembly selectively actuated due to the magnetic field without response to the flow. Therefore, we have developed a versatile magnetic microstructure fabrication method that is very simple and fast, enabling rapid in situ fabrication and actuation
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DOI
10.1109/JMEMS.2011.2159093
ISSN
1057-7157
Appears in Collections:
MSE_Journal Papers
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