BROWSE

Related Researcher

Author's Photo

Park, Hyung Wook
Multiscale Hybrid Manufacturing Lab
Research Interests
  • Advanced manufacturing process and system
  • Flexible manufacturing
  • Multiscale materials

ITEM VIEW & DOWNLOAD

Hybrid deburring process assisted by a large pulsed electron beam (LPEB) for laser-fabricated patterned metal masks

Cited 0 times inthomson ciCited 0 times inthomson ci
Title
Hybrid deburring process assisted by a large pulsed electron beam (LPEB) for laser-fabricated patterned metal masks
Author
Kim, JisooPark, Hyung Wook
Issue Date
2015-12
Publisher
ELSEVIER SCIENCE BV
Citation
APPLIED SURFACE SCIENCE, v.357, no.B, pp.1676 - 1683
Abstract
The quality of pixels on displays and semiconductors is directly related to the surface quality of the patterned metal mask used. Burrs generated on the patterned metal mask can degrade the quality of pixels on microelectronic devices during the deposition process. In this study, experimental observations of abrasive deburring along with large pulsed electron beam (LPEB) irradiation were performed to evaluate the deburring effects on patterned metal masks. Numerical modeling of LPEB irradiation approximately predicted melting depths and the experimental studies revealed limitations in the size of burrs removed by LPEB irradiation. Thus a LPEB-assisted hybrid deburring process was developed to eliminate burrs of metal masks regardless of their size. The size of burrs remaining after the LPEB-assisted hybrid deburring process was reduced to approximately 7.2 μm which was much less than the results of abrasive deburring alone (38.01 μm). The burr size distribution was reduced by 85% and surface roughness (Ra) was decreased from 640 nm to 121 nm, indicating a uniform surface texture.
URI
https://scholarworks.unist.ac.kr/handle/201301/17704
URL
http://www.sciencedirect.com/science/article/pii/S0169433215024459
DOI
10.1016/j.apsusc.2015.10.047
ISSN
0169-4332
Appears in Collections:
MEN_Journal Papers
Files in This Item:
There are no files associated with this item.

find_unist can give you direct access to the published full text of this article. (UNISTARs only)

Show full item record

qrcode

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

MENU