Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer

Abstract

The effective synthesis of two-dimensional transition metal dichalcogenides alloy is essential for successful application in electronic and optical devices based on a tunable band gap. Here we show a synthesis process for Mo<inf>1-x</inf>W<inf>x</inf>S<inf>2</inf> alloy using sulfurization of super-cycle atomic layer deposition Mo<inf>1-x</inf>W<inf>x</inf>O<inf>y</inf>. Various spectroscopic and microscopic results indicate that the synthesized Mo<inf>1-x</inf>W<inf>x</inf>S<inf>2</inf> alloys have complete mixing of Mo and Watoms and tunable band gap by systematically controlled composition and layer number. Based on this, we synthesize a vertically composition-controlled (VCC) Mo<inf>1-x</inf>W<inf>x</inf>S<inf>2</inf> multilayer using five continuous super-cycles with different cycle ratios for each super-cycle. Angle-resolved X-ray photoemission spectroscopy, Raman and ultraviolet-visible spectrophotometer results reveal that a VCC Mo<inf>1-x</inf>W<inf>x</inf>S<inf>2</inf> multilayer has different vertical composition and broadband light absorption with strong interlayer coupling within a VCC Mo<inf>1-x</inf>W<inf>x</inf>S<inf>2</inf> multilayer. Further, we demonstrate that a VCC Mo<inf>1-x</inf>W<inf>x</inf>S<inf>2</inf> multilayer photodetector generates three to four times greater photocurrent than MoS<inf>2</inf>-and WS<inf>2</inf>-based devices, owing to the broadband light absorption. © 2015 Macmillan Publishers Limited