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Kang, Hyun-Wook
3D Biofabrication Lab (3BL)
Research Interests
  • 3D Bioprinting, tissue engineering and regenerative medicine, Body-on-a-chip

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Design and measurement of nanopatterns for FIB reliability assessments

DC Field Value Language
dc.contributor.author Kang, Hyun-Wook ko
dc.contributor.author Cho, Dong-Woo ko
dc.date.available 2015-08-05T00:26:45Z -
dc.date.created 2015-08-04 ko
dc.date.issued 2007-05 -
dc.identifier.citation MICROELECTRONIC ENGINEERING, v.84, no.5-8, pp.818 - 821 ko
dc.identifier.issn 0167-9317 ko
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/13348 -
dc.identifier.uri http://www.sciencedirect.com/science/article/pii/S0167931707000391 ko
dc.description.abstract Focused ion beam (FIB) systems are one of the most important pieces of equipment in nanoscale machining, and can etch material and deposit 3-D nanoscale structures with high aspect ratios. However, despite considerable research effort, a definitive method for evaluating the reliability of FIB systems had not been developed. In this paper, we propose a reliability assessment method that utilizes fabricated nanopatterns. Since the characteristics of a FIB system are included in the nanopatterns, these can be used to assess its reliability. We suggest items and nanopatterns that can be applied to the reliability assessment tests. To determine the suitability of the proposed method, we fabricated several nanopatterns using different FIB systems and measured them under a scanning electron microscope to compare the actual and designed dimensions. The results showed that the proposed method is suitable for assessing the reliability of FIB systems. (c) 2007 Elsevier B.V. All rights reserved ko
dc.description.statementofresponsibility close -
dc.language ENG ko
dc.publisher ELSEVIER SCIENCE BV ko
dc.subject focused ion beam ko
dc.subject nanopatterns ko
dc.subject reliability assessment ko
dc.title Design and measurement of nanopatterns for FIB reliability assessments ko
dc.title.alternative Design and measurement of nanopatterns for FIB reliability assessments ko
dc.type ARTICLE ko
dc.identifier.scopusid 2-s2.0-34247634114 ko
dc.identifier.wosid 000247182500030 ko
dc.type.rims ART ko
dc.description.wostc 2 *
dc.description.scopustc 2 *
dc.date.tcdate 2015-12-28 *
dc.date.scptcdate 2015-11-04 *
dc.identifier.doi 10.1016/j.mee.2007.01.029 ko
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