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DC Field | Value | Language |
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dc.citation.endPage | 156 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 148 | - |
dc.citation.title | CHEMISTRY OF MATERIALS | - |
dc.citation.volume | 27 | - |
dc.contributor.author | Oh, Il-Kwon | - |
dc.contributor.author | Kim, Kangsik | - |
dc.contributor.author | Lee, Zonghoon | - |
dc.contributor.author | Ko, Kyung Yong | - |
dc.contributor.author | Lee, Chang-Wan | - |
dc.contributor.author | Lee, Su Jeong | - |
dc.contributor.author | Myung, Jae Min | - |
dc.contributor.author | Lansalot-Matras, Clement | - |
dc.contributor.author | Noh, Wontae | - |
dc.contributor.author | Dussarrat, Christian | - |
dc.contributor.author | Kim, Hyungjun | - |
dc.contributor.author | Lee, Han-Bo-Ram | - |
dc.date.accessioned | 2023-12-22T01:43:56Z | - |
dc.date.available | 2023-12-22T01:43:56Z | - |
dc.date.created | 2015-01-15 | - |
dc.date.issued | 2015-01 | - |
dc.description.abstract | Rare earth oxide (REO) atomic layer deposition (ALD) processes are investigated for hydrophobic coatings. Thermal and plasma-enhanced ALD (PE-ALD) Er2O3 and Dy2O3 are developed using the newly synthesized Er and Dy precursors bis-methylcyclopentadienyl-diisopropyl-acetamidinate-erbium and bis-isopropylcyclopentadienyl-diisopropyl-acetamidinate-dysprosium, with H2O and O-2 plasma counter oxidants. The Er and Dy precursors show typical ALD growth characteristics with no nucleation incubation, indicating that they are suitable ALD precursors. The hydrophobicities of ALD-grown Er2O3 and D2O3 are investigated, together with those of ALD-grown Y(2)O(3)Z, La2O3, and CeO2 that were previously developed for high-k applications. All the ALD-grown REOs show high hydrophobicity, with water contact angles as high as 90 degrees. After annealing at 500 degrees C in air for 2h, hydrophobicity is degraded depending on the kind of material; this degradation is related to the hygroscopy of REOs. In addition, we demonstrate the fabrication of a superhydrophobic surface by depositing highly conformal ALD REO films on 3D Si nanowire nanostructures. The Si NWs are conformally coated with ALD Y2O3, yielding a surface with a water contact angle of about 158 degrees. The ALD REOs reported herein should find widespread applicability in the fabrication of robust hydrophobic coatings. | - |
dc.identifier.bibliographicCitation | CHEMISTRY OF MATERIALS, v.27, no.1, pp.148 - 156 | - |
dc.identifier.doi | 10.1021/cm503659d | - |
dc.identifier.issn | 0897-4756 | - |
dc.identifier.scopusid | 2-s2.0-84921377493 | - |
dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/10143 | - |
dc.identifier.url | http://pubs.acs.org/doi/abs/10.1021/cm503659d | - |
dc.identifier.wosid | 000348085300020 | - |
dc.language | 영어 | - |
dc.publisher | AMER CHEMICAL SOC | - |
dc.title | Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition | - |
dc.type | Article | - |
dc.description.isOpenAccess | FALSE | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Physical; Materials Science, Multidisciplinary | - |
dc.relation.journalResearchArea | Chemistry; Materials Science | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | SUPERHYDROPHOBIC SURFACES | - |
dc.subject.keywordPlus | ELECTRICAL CHARACTERISTICS | - |
dc.subject.keywordPlus | WATER DROPLETS | - |
dc.subject.keywordPlus | NANOROD FILMS | - |
dc.subject.keywordPlus | GATE OXIDES | - |
dc.subject.keywordPlus | COATINGS | - |
dc.subject.keywordPlus | TEMPERATURE | - |
dc.subject.keywordPlus | TRANSITION | - |
dc.subject.keywordPlus | DEPENDENCE | - |
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