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Effect of the Bilayer Period of Atomic Layer Deposition on the Growth Behavior and Electrical Properties of the Amorphous In-Zn-O Film File

Lee, Sangbong , Kang, Yun-Ho , Kim, Min-Sik , Lee, Hyerin , Cho, Yeong-Ho , Kim, Minsu , Yoon, Tae-Sik , Kim, Hyun-Mi , Kim, Ki-Bum

Article Issue Date2020-09 View48
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