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Material-Specific Diffusion Barrier Performance of Al2O3 for p-Type and n-Type Oxide Semiconductors in Oxide-Based CMOS Applications File

Zhang, Yuxuan , Lee, Dong Hun , Park, Honghwi , Chang, Sung-Jin , Baek, Jinwook , Jun, Byung-Hyuk , Park, Jeongmin , Kim, Dohyeon , Song, Han Wook , Ko, Dong-Kyun , et al

Article Issue Date2025-07 View67
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