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Pioneering Carboxylated Zirconium Oxo Cluster Resist for Precision Nanoscale Patterning File File

Ha, Seong-Ji , Yoon, Jong-Chul , Kim, Minkyeong , Kwon, Bo Kyu , Jeon, Doojin , Gyeong, Seung Gyu , Jang, Ji-Hyun

Article Issue Date2026-01 View29
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