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Browsing by Keyword : electrical resistivity

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Improvement of the Diffusion Barrier Performance of Ru by Incorporating a WNx Thin Film for Direct-Plateable Cu Interconnects File

Sari, Windu , Eom, Tae-Kwang , Jeon, Chan-Wook , Sohn, Hyunchul , Kim, Soo-Hyun

Article Issue Date2009-04 View111
Plasma-Enhanced Atomic Layer Deposition of TaCx Films Using Tris(neopentyl) Tantalum Dichloride and H-2 Plasma File

Kim, Tae-Ho , Eom, Tae-Kwang , Kim, Soo-Hyun , Kang, Dae-Hwan , Kim, Hoon , Yu, Sangho , Lim, Jin Mook

Article Issue Date2011-05 View101
Pulsed CVD-W Nucleation Layer Using WF6 and B2H6 for Low Resistivity W File

Kim, Choon-Hwan , Rho, Il-Cheol , Kim, Soo-Hyun , Han, Il-Keoun , Kang, Hyo-Sang , Ryu, Seung-Wook , Kim, Hyeong-Joon

Article Issue Date2009-06 View152
탄소나노튜브 및 환원된 산화그래핀과 고분자간 계면결합력이 나노복합재의 압전 거동에 미치는 영향

Hwang, Sang-Ha , Kim, Hyeon-ju , Sung, Dae-Han , Jung, Yeong-Tae , Kang, Ku-Hyek , Park, Young-Bin

Article Issue Date2012-09 View86
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