Scholarworks@UNIST

UNIST Library
Search

Browsing by Keyword : TUNGSTEN THIN-FILMS

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
가 나 다 라 마 바 사 아 자 차 카 타 파 하
Sort by: In order: Results/Page Etal:

Showing results 1 to 2 of 2

Phase and microstructure of ALD-W films deposited using B2H6 and WF6 and their effects on CVD-W growth File

Kim, Soo-Hyun , Yeom, Seung-Jin , Kwak, Nohjung , Sohn, Hyunchul

Article Issue Date2007-12 View128
Pulsed CVD-W Nucleation Layer Using WF6 and B2H6 for Low Resistivity W File

Kim, Choon-Hwan , Rho, Il-Cheol , Kim, Soo-Hyun , Han, Il-Keoun , Kang, Hyo-Sang , Ryu, Seung-Wook , Kim, Hyeong-Joon

Article Issue Date2009-06 View152
1

RSS 1.0 RSS 2.0

CONTACT US

UNIST | Library

Tel : 052-217-1403 / Email : scholarworks@unist.ac.kr

Copyright (c) 2023 by UNIST LIBRARY. All rights reserved.

ScholarWorks@UNIST was established as an OAK Project for the National Library of Korea.