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Atomic Layer Modulation of Multicomponent Thin Films through Combination of Experimental and Theoretical Approaches File

Nguyen, Chi Thang , Gu, Bonwook , Cheon, Taehoon , Park, Jeongwoo , Khan, Mohammad Rizwan , Kim, Soo-Hyun , Shong, Bonggeun , Lee, Han-Bo-Ram

Article Issue Date2021-06 View138
Growth and Characterization of BeO Thin Films Grown by Atomic Layer Deposition Using H2O and O3 as Oxygen Sources File

Lee, Woo Chul , Cho, Cheol Jin , Kim, Sangtae , Larsen, Eric S. , Yum, Jung Hwan , Bielawski, Christopher W. , Hwang, Cheol Seong , Kim, Seong Keun

Article Issue Date2017-08 View79
Synthesis of nanodispersed oxides of vanadium, titanium, molybdenum, and tungsten on mesoporous silica using atomic layer deposition File

Herrera, Jose E. , Kwak, Jahun , Hu, Jian Zhi , Wang, Yong , Peden, Charles H. F.

Article Issue Date2006-10 View148
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