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Atomic Layer Modulation of Ruthenium Aluminum Oxide through Reactivity Control of Precursors for Seedless Copper Interconnects File

Nguyen, Chi Thang , Kim, Miso , Kim, Youn-Hye , Cheon, Taehoon , Trinh, Ngoc Le , Kim, Sehee , Kim, Soo-Hyun , Shong, Bonggeun , Lee, Han-Bo-Ram

Article Issue Date2025-12 View27
Cobalt titanium nitride amorphous metal alloys by atomic layer deposition File

Nam, Taewook , Lee, Chang Wan , Cheon, Taehoon , Lee, Woo Jae , Kim, Soo-Hyun , Kwon, Se-Hun , Lee, Han-Bo-Ram , Kim, Hyungjun

Article Issue Date2018-03 View148
Difference in electronic structure between tetragonal and cubic SrNbO2N File

Borse, Pramod H. , Kim, Hyun G. , Lee, Jae Sung

Article Issue Date2005-08 View128
Improvement of the Diffusion Barrier Performance of Ru by Incorporating a WNx Thin Film for Direct-Plateable Cu Interconnects File

Sari, Windu , Eom, Tae-Kwang , Jeon, Chan-Wook , Sohn, Hyunchul , Kim, Soo-Hyun

Article Issue Date2009-04 View111
Potentiostatic electrodeposition of Cu thin films directly on ALD Ru diffusion barrier and trench-filling for Cu interconnect File

Im, Byoungyong , Kim, Sunjung , Kim, Soo-Hyun , Park, Kwangsuk

Article Issue Date2026-03 View15
Ru/WNx Bilayers as Diffusion Barriers for Cu Interconnects File

Sari, Windu , Eom, Tae-Kwang , Choi, Sang-Hyeok , Kim, Soo-Hyun

Article Issue Date2011-05 View100
Single-Crystalline Nanobelts Composed of Transition Metal Ditellurides File

Kwak, Jinsung , Jo, Yongsu , Song, Seunguk , Kim, Jung Hwa , Kim, Se-Yang , Lee, Jae-Ung , Lee, Sungwoo , Park, Jungmin , Kim, Kangwon , Lee, Gun-Do , et al

Article Issue Date2018-07 View139
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