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Suspended 1D nanoheaters for ultralow-power thermal conductivity detector-type gas sensors fabricated via a simple four-step wafer-scale process File

Cho, Wootaek , Yoo, Jihyeon , Kwak, Jong-Hyun , Shin, Heungjoo

Article Issue Date2025-11 View73
Thermal conductivity detector (TCD)-type gas sensor based on a batch-fabricated 1D nanoheater for ultra-low power consumption File

Cho, Wootaek , Kim, Taejung , Shin, Heungjoo

Article Issue Date2022-11 View164
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