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Combined molecular dynamics simulations and reaction kinetics study on wettability of trimethylsilyl functionalized silicon surfaces File

Jeong, Hyunhak , Kim, Byungjo , Park, Taeuk , Yoo, Suyoung , Nam, Sang Ki

Article Issue Date2022-12 View30
Comparison of etching characteristics of low GWP gases to replace c-C4F8 File

Ju, Jeonga

Thesis Issue Date2024-02 View42
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