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Atomic Layer Modulation of Ruthenium Aluminum Oxide through Reactivity Control of Precursors for Seedless Copper Interconnects File

Nguyen, Chi Thang , Kim, Miso , Kim, Youn-Hye , Cheon, Taehoon , Trinh, Ngoc Le , Kim, Sehee , Kim, Soo-Hyun , Shong, Bonggeun , Lee, Han-Bo-Ram

Article Issue Date2025-12 View27
Self‐Formation of a Ru/ZnO Multifunctional Bilayer for the Next‐Generation Interconnect Technology via Area‐Selective Atomic Layer Deposition File

Mori, Yuki , Cheon, Taehoon , Kotsugi, Yohei , Kim, Youn‐Hye , Park, Yejin , Ansari, Mohd Zahid , Mohapatra, Debananda , Jang, Yujin , Bae, Jong‐Seong , Kwon, Woobin , et al

Article Issue Date2023-08 View134
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