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High-quality BeO films fabricated using discrete feeding plasma-enhanced atomic layer deposition File

Bae, Jonghyun , Chae, Juyoung , Jang, Yoonseo , Jung, Dohwan , Han, Sangoh , Sultane, Prakash R. , Bielawski, Christopher W. , Oh, Jungwoo

Article Issue Date2025-08 View93
Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications File File

Yeo, Seungmin , Nandi, Dip K. , Rahul, R. , Kim, Tae Hyun , Shong, Bonggeun , Jang, Yujin , Bae, Jong-Seong , Han, Jeong Woo , Kim, Soo-Hyun , Kim, Hyungjun

Article Issue Date2018-11 View166
Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization File

Choi, Sang-Kyung , Kim, Hangil , Kim, Junbeam , Cheon, Taehoon , Seo, Jong Hyun , Kim, Soo-Hyun

Article Issue Date2015-09 View73
Very high frequency plasma reactant for atomic layer deposition File

Oh, Il-Kwon , Yoo, Gilsang , Yoon, Chang Mo , Kim, Tae Hyung , Yeom, Geun Young , Kim, Kangsik , Lee, Zonghoon , Jung, Hanearl , Lee, Chang Wan , Kim, Hyungjun , et al

Article Issue Date2016-11 View192
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