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Approach to Low Contact Resistance Formation on Buried Interface in Oxide Thin-Film Transistors: Utilization of Palladium-Mediated Hydrogen Pathway File

Shi, Yuhao , Tsuji, Masatake , Cho, Hanjun , Ueda, Shigenori , Kim, Junghwan , Hosono, Hideo

Article Issue Date2024-04 View131
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