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Atomic layer deposition of tungsten and tungsten-based compounds using WCl5 and various reactants selected by density functional theory File File

Lee, Minyoung , Hidayat, Romel , Nandi, Dip K. , Kim, Tae Hyun , Kim, Yewon , Kim, Seongyoon , Lee, Won -Jun , Kim, Soo-Hyun

Article Issue Date2021-10 View266
Formation of buried superconducting Mo2N by nitrogen-ion-implantation File File

Lee, Joonhyuk , Park, Jun Kue , Lee, Joon Woo , Heo, Yunseok , Oh, Yoon Seok , Lee, Jae S. , Cho, Jinhyung , Jeen, Hyoungjeen

Article Issue Date2020-12 View118
Some Insights into Atomic Layer Deposition of MoNx Using Mo(CO)(6) and NH3 and Its Diffusion Barrier Application File

Tae Hyun Kim , Nandi, Dip K. , Ramesh, Rahul , Han, Seung-Min , Shong, Bonggeun , Kim, Soo-Hyun

Article Issue Date2019-10 View116
Structural characterization and bonding energy analysis for plasma-activated bonding of SiCN films: A reactive molecular dynamics study File

Kim, Juheon , Jang, Minki , Choi, Won Hong , Park, Junhyeok , Kim, Byungjo , Kim, Sunghyup , Chung, Hayoung

Article Issue Date2026-07 View20
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