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Geometrical Anatomy for Oxygen Vacancies in Epitaxial Hf0.5Zr0.5O2 Films Grown via Atomic Layer Deposition File

An, Chihwan , Cho, Jung Woo , Lee, Tae Yoon , Song, Myeong Seop , Kang, Baekjune , Kim, Hongju , Lee, Jun Hee , Sohn, Chang Hee , Chae, Seung Chul

Article Issue Date2025-04 View171
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