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Comparative study on atomic layer deposition of HfO(2)via substitution of ligand structure with cyclopentadiene File

Park, Sungmin , Park, Bo-Eun , Yoon, Hwi , Lee, Sanghun , Nam, Taewook , Cheon, Taehoon , Kim, Soo-Hyun , Cheon, Hwansung , Im, Sangkyun , Seong, Taegeun , et al

Article Issue Date2020-01 View164
Preparation of wafer-scale highly conformalamorphous hafnium dioxide thin films by atomic layer deposition using a thermally stable boratabenzene ligand-containing hafnium precursor File

Ansari, Mohd Zahid , Janicek, Petr , Park, Ye Jin , NamGung, Sook , Cho, Bo Yeon , Nandi, Dip K. , Jang, Yujin , Bae, Jong-Seong , Hong, Tae Eun , Cheon, Taehoon , et al

Article Issue Date2023-05 View147
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