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Influence of post-annealing on structural, optical and electrical properties of tin nitride thin films prepared by atomic layer deposition File

Ansari, Mohd Zahid , Janicek, Petr , Nandi, Dip K. , Palka, Karel , Slang, Stanislav , Kim, Deok Hyun , Cheon, Taehoon , Kim, Soo-Hyun

Article Issue Date2021-02 View104
New class of Zr precursor containing boratabenzene ligand enabling highly conformal wafer-scale zirconium dioxide thin films through atomic layer deposition File

Ansari, Mohd Zahid , Janicek, Petr , Namgung, Sook , Kim, Hyangil , Nandi, Dip K. , Cheon, Taehoon , Siddiqui, Masoom Raza , Imran, Muhammad , Jang, Yujin , Bae, Jong-Seong , et al

Article Issue Date2024-03 View122
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