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Atomic Layer Deposition of Ru for Replacing Cu-Interconnects File

Kotsugi, Yohei , Han, Seung-Min , Kim, Youn-Hye , Cheon, Taehoon , Nandi, Dip K. , Ramesh, Rahul , Yu, Neung-Kyung , Son, Kirak , Tsugawa, Tomohiro , Ohtake, Shigeyuki , et al

Article Issue Date2021-07 View20
Wafer-Scale Synthesis of Highly Oriented 2D Topological Semimetal PtTe2 via Tellurization File

Choi, Minhyuk , Oh, Saeyoung , Hahn, Sungsoo , Ji, Yubin , Jo, Min-kyung , Kim, Jeongtae , Ju, Tae-Seong , Kim, Gyeongbo , Gyeon, Minseung , Lee, Yuhwa , et al

Article Issue Date2024-06 View34
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