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Batch nanofabrication of nanoheater for power-efficient gas sensors and wireless IoT application File File

Kim, Taejung

Thesis Issue Date2024-08 View143
Suspended 1D nanoheaters for ultralow-power thermal conductivity detector-type gas sensors fabricated via a simple four-step wafer-scale process File

Cho, Wootaek , Yoo, Jihyeon , Kwak, Jong-Hyun , Shin, Heungjoo

Article Issue Date2025-11 View73
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