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Large-Area Uniform 1-nm-Level Amorphous Carbon Layers from 3D Conformal Polymer Brushes. A "Next-Generation" Cu Diffusion Barrier? File

Kang, Yun-Ho , Lee, Sangbong , Choi, Youngwoo , Seong, Won Kyung , Han, Kyu Hyo , Kim, Jang Hwan , Kim, Hyun-Mi , Hong, Seungbum , Lee, Sun Hwa , Ruoff, Rodney S. , et al

Article Issue Date2022-04 View88
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