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Self‐Formation of a Ru/ZnO Multifunctional Bilayer for the Next‐Generation Interconnect Technology via Area‐Selective Atomic Layer Deposition File

Mori, Yuki , Cheon, Taehoon , Kotsugi, Yohei , Kim, Youn‐Hye , Park, Yejin , Ansari, Mohd Zahid , Mohapatra, Debananda , Jang, Yujin , Bae, Jong‐Seong , Kwon, Woobin , et al

Article Issue Date2023-08 View33
The effect of ion beam bombardment on the properties of Ta(C)N films deposited from pentakis-diethylamido-tantalum File

Kim, Soo-Hyun , Im, Se-Joon , Kim, Ki-Bum

Article Issue Date2002-08 View27
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