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Batch Nanofabrication of Suspended Single 1D Nanoheaters for Ultralow-Power Metal Oxide Semiconductor-Based Gas Sensors File

Kim, Taejung , Cho, Wootaek , Kim, Beomsang , Yeom, Junyeong , Kwon, Yeong Min , Baik, Jeong Min , Kim, Jae Joon , Shin, Heungjoo

Article Issue Date2022-12 View284
Suspended 1D nanoheaters for ultralow-power thermal conductivity detector-type gas sensors fabricated via a simple four-step wafer-scale process File

Cho, Wootaek , Yoo, Jihyeon , Kwak, Jong-Hyun , Shin, Heungjoo

Article Issue Date2025-11 View70
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