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Browsing by Keyword : Batch fabrication

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Development of wafer-level batch fabrication for combined atomic force-scanning electrochemical microscopy (AFM-SECM) probes File

Shin, Heungjoo , Hesketh, P. J. , Mizaikofff, B. , Kranz, C.

Article Issue Date2008-09 View123
Thermal conductivity detector (TCD)-type gas sensor based on a batch-fabricated 1D nanoheater for ultra-low power consumption File

Cho, Wootaek , Kim, Taejung , Shin, Heungjoo

Article Issue Date2022-11 View163
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