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Showing results 8 to 13 of 13

Low Temperature Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and O-2 File

Eom, Tae-Kwang , Sari, Windu , Choi, Kyu-Jeong , Shin, Woong-Chul , Kim, Jae Hyun , Lee, Do-Joong , Kim, Ki-Bum , Sohn, Hyunchul , Kim, Soo-Hyun

Article Issue Date2009-08 View4
N-Doped Porous Graphitic Carbon Hybridized with CrN Nanocrystals: Electrocatalysis-Induced Li2S Three-Dimensional Growth and Enhanced Cathode Kinetics File

Zhou, Xueqin , Zhou, Ji , Sun, Longhua , Chen, Shang , Wang, Manyun , Meng, Xiaodong , Qu, Jin , Sun, Congkai , Yu, Zhong-Zhen , Huang, Yong , et al

Article Issue Date2023-11 View10
Optimization of Al interlayer thickness for the multilayer diffusion barrier scheme in Cu metallization File

Datta, A , Nam, KT , Kim, Soo-Hyun , Kim, KB

Article Issue Date2002-07 View10
Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization File

Choi, Sang-Kyung , Kim, Hangil , Kim, Junbeam , Cheon, Taehoon , Seo, Jong Hyun , Kim, Soo-Hyun

Article Issue Date2015-09 View3
The effect of ion beam bombardment on the properties of Ta(C)N films deposited from pentakis-diethylamido-tantalum File

Kim, Soo-Hyun , Im, Se-Joon , Kim, Ki-Bum

Article Issue Date2002-08 View10
TiN Nanoparticles on CNT-Graphene Hybrid Support as Noble-Metal-Free Counter Electrode for Quantum-Dot-Sensitized Solar Cells File

Youn, Duck Hyun , Seol, Minsu , Kim, Jae Young , Jang, Ji-Wook , Choi, Youngwoo , Yong, Kijung , Lee, Jae Sung

Article Issue Date2013-02 View6
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