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Molecular Functionality Switching of Isomorphic Organoantimony Complexes between High-Sensitivity Radical Initiator and Quencher for Reliable Extreme Ultraviolet Lithography File

Kang, Yeo Kyung , You, Dong Kyun , Lee, Sun Jin , Gupta, Vishal , Kim, Dowon , Hwang, Jinho , Jee, Hae-geun , Hong, Sukwon , Lee, Geunsik , Lee, Kang Mun , et al

Article Issue Date2025-10 View42
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