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Issue DateTitleAuthor(s)TypeView
2020-05Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodesLee, Jae Hwan; Park, Bo-Eun; Thompson, David; Choe, Myeonggi; Lee, Zonghoon; Oh, Il-Kwon; Kim, Woo-Hee; Kim, HyungjunARTICLE116
2015-05In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxidesOh, Il-Kwon; Kim, Kangsik; Lee, Zonghoon; Song, Jeong-Gyu; Lee, Chang Wan; Thompson, David; Lee, Han-Bo-Ram; Kim, Woo-Hee; Maeng, Wan Joo; Kim, HyungjunARTICLE1936
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