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Some Insights into Atomic Layer Deposition of MoNx Using Mo(CO)(6) and NH3 and Its Diffusion Barrier Application File

Tae Hyun Kim , Nandi, Dip K. , Ramesh, Rahul , Han, Seung-Min , Shong, Bonggeun , Kim, Soo-Hyun

Article Issue Date2019-10 View47
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