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Atomic layer modulation (ALM) process for preparing atomic-scale homogeneous alloy thin films

Son, Yeseul , Cheon, Taehoon , Kim, Sang-Bok , Mohapatra, Debananda , Kim, Soo-Hyun

Conference Paper Issue Date2024-10-19 View35
Atomic-scale homogeneous PtRu alloy thin films prepared by atomic layer modulation (ALM)

Son, Yeseul , Kim, Sang Bok , Cheon, Taehoon , Kim, Soo-Hyun

Conference Paper Issue Date2024-08-07 View30
Enhancing selectivity and sensitivity in gas sensors through noble metal-decorated ZnO and machine learning File

Kwon, Yeong Min , Son, Yeseul , Lee, Do Hyung , Lim, Min Hyeok , Han, Jin Kyu , Jang, Moonjeong , Park, Seoungwoong , Kang, Saewon , Yim, Soonmin , Myung, Sung , et al

Article Issue Date2025-06 View27
Facile formation of nanoporous reduced graphene oxide via epoxy-based negative photoresist laser irradiation for highly sensitive and selective gas detection File

Yang, Min Seok , Bae, Sung-Kuk , Seo, Dong-Bum , Lee, Kichul , Son, Yeseul , Kim, Soo-Hyun , Jung, Jae-Hwan , An, Ki-Seok , Park, Inkyu , Seo, Jung Hwan

Article Issue Date2025-03 View49
Fluorine-free Plasma Enhanced Atomic Layer Deposited Ultrathin Tungsten Nitride Thin Films for Dual Diffusion Barrier Performance File

Seo, Kang-Min , Mohapatra, Debananda , Bae, Gun-Woo , Ansari, Mohd Zahid , Son, Yeseul , Jang, Yujin , Bae, Jong-Seong , Hong, Tae Eun , Kim, Soo-Hyun

Article Issue Date2023-12 View78
Improved performance of atomic layer deposited Ru thin film prepared by 6-step ALD process as a Cu alternative interconnect

Kim, Jeongha , Kim, Sang Bok , Cheon, Taehoon , Son, Yeseul , Kim, Soo-Hyun

Conference Paper Issue Date2024-06-24 View48
Improved properties of atomic layer deposited Ru films by providing additional reactant for Cu alternative interconnects

Kim, Jeongha , Son, Yeseul , Cheon, Taehoon , Kim, Sang Bok , Kim, Soo-Hyun

Conference Paper Issue Date2024-08-06 View40
Impurity Reduction Leading to Enhanced Properties in Atomic Layer Deposited Ru Films by Introducing Additional Reactant for Cu Alternative Interconnects

Kim, Soo-Hyun , Hong, Tae Eun , Kim, Sang Bok , Bae, Jong-Seong , Son, Yeseul , Kim, Jeongha

Conference Paper Issue Date2024-11-20 View22
New class of Zr precursor containing boratabenzene ligand enabling highly conformal wafer-scale zirconium dioxide thin films through atomic layer deposition File

Ansari, Mohd Zahid , Janicek, Petr , Namgung, Sook , Kim, Hyangil , Nandi, Dip K. , Cheon, Taehoon , Siddiqui, Masoom Raza , Imran, Muhammad , Jang, Yujin , Bae, Jong-Seong , et al

Article Issue Date2024-03 View71
Ultrahigh Sensitivity for Thermographic Human-Machine Interface via Precious Metals Atomic Layer Deposition on V-MXene: Computational and Experimental Exploration File File

Mohapatra, Debananda , Kang, Hyun Jin , Lee, Sanghyuk , Son, Yeseul , Ansari, Mohd Zahid , Kang, Youngho , Lee, Jung Woo , Kim, Soo-Hyun

Article Issue Date2024-08 View66
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