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Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films File

Choi, Taejin , Yeo, Seungmin , Song, Jeong-Gyu , Seo, Seunggi , Jang, Byeonghyeon , Kim, Soo-Hyun , Kim, Hyungjun

Article Issue Date2018-06 View98
Layer-by-layer NH3 plasma treatment for area-selective atomic layer deposition of high-quality SiO2 thin films File

Lee, Sanghun , Seo, Seunggi , Kim, Tae Hyun , Yoon, Hwi , Park, Seonyeong , Na, Seunggyu , Seo, Jeongwoo , Kim, Soo-Hyun , Chung, Seung-min , Kim, Hyungjun

Article Issue Date2025-03 View12
Surface Energy Change of Atomic-Scale Metal Oxide Thin Films by Phase Transformation File

Oh, Il-Kwon , Zeng, Li , Kim, Jae-Eun , Park, Jong-Seo , Kim, Kangsik , Lee, Hyunsoo , Seo, Seunggi , Khan, Mohammad Rizwan , Kim, Sangmo , Park, Chung Wung , et al

Article Issue Date2020-01 View84
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