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Atomistic-scale Simulations on Surface Activation Process of Dielectric Oxides for Hybrid Bonding Applications

Hahn, Seung Ho , Lee, Hyunjae , Jo, Young Hyun , Kim, Byungjo , Kim, Wooyoung , Choi, Wonyoung , Lim, Kyeongbin , Rhee, Minwoo

Conference Paper Issue Date2021-12-01 View17
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