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Atomic layer lithography of wafer-scale nanogap arrays for extreme confinement of electromagnetic waves File

Chen, Xiaoshu , Park, Hyeong-Ryeol , Pelton, Matthew , Piao, Xianji , Lindquist, Nathan C. , Im, Hyungsoon , Kim, Yun Jung , Ahn, Jae Sung , Ahn, Kwang Jun , Park, Namkyoo , et al

Article Issue Date2013-09 View42
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