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Comparative study on atomic layer deposition of HfO(2)via substitution of ligand structure with cyclopentadiene File

Park, Sungmin , Park, Bo-Eun , Yoon, Hwi , Lee, Sanghun , Nam, Taewook , Cheon, Taehoon , Kim, Soo-Hyun , Cheon, Hwansung , Im, Sangkyun , Seong, Taegeun , et al

Article Issue Date2020-01 View18
Direct observation of leakage currents in a metal-insulator-metal capacitor using in situ transmission electron microscopy File

Kim, Kangsik , Kim, Jung Hwa , Park, Bo-Eun , Kim, Hyungjun , Lee, Zonghoon

Article Issue Date2018-10 View25
Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodes File

Lee, Jae Hwan , Park, Bo-Eun , Thompson, David , Choe, Myeonggi , Lee, Zonghoon , Oh, Il-Kwon , Kim, Woo-Hee , Kim, Hyungjun

Article Issue Date2020-05 View26
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