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Group IV Transition Metal (M = Zr, Hf) Precursors for High-kappa Metal Oxide Thin Films File

Lee, Ga Yeon , Yeo, Seungmin , Han, Seong Ho , Park, Bo Keun , Eom, Taeyong , Kim, Jeong Hwan , Kim, Soo-Hyun , Kim, Hyungjun , Son, Seung Uk , Chung, Taek-Mo

Article Issue Date2021-12 View21
Heteroleptic strontium complexes stabilized by donor-functionalized alkoxide and beta-diketonate ligands File

George, Sheby Mary , Kim, Hyo-Suk , Oh, Hyun Ji , Lah, Myoung Soo , Jeon, Dong Ju , Park, Bo Keun , Han, Jeong Hwan , Kim, Chang Gyoun , Chung, Taek-Mo

Article Issue Date2015-08 View36
Hexa-coordinated strontium silylamide complex stabilized by tetradentate alkoxy ligand File File

George, Sheby Mary , Jung, Eun Ae , Kim, Hyo-Suk , Lah, Myoung Soo , Park, Bo Keun , Kim, Chang Gyoun , Chung, Taek-Mo

Article Issue Date2015-11 View16
Highly Conformal Amorphous W-Si-N Thin Films by Plasma-Enhanced Atomic Layer Deposition as a Diffusion Barrier for Cu Metallization File

Hong, Tae Eun , Jung, Jae-Hun , Yeo, Seungmin , Cheon, Taehoon , Bae, So Ik , Kim, Soo-Hyun , Yeo, So Jeong , Kim, Hyo-Suk , Chung, Taek-Mo , Park, Bo Keun , et al

Article Issue Date2015-01 View18
Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu File

Jang, Yujin , Kim, Jun Beom , Hong, Tae Eun , Yeo, So Jeong , Lee, Sunju , Jung, Eun Ae , Park, Bo Keun , Chung, Taek-Mo , Kim, Chang Gyoun , Lee, Do-Joong , et al

Article Issue Date2016-04 View25
New Heteroleptic Cobalt Precursors for Deposition of Cobalt-Based Thin Films File File

Han, Seung Ho , George, Sheby Mary , Lee, Ga Yeon , Han, Jeong Hwan , Park, Bo Keun , Kim, Chang Gyoun , Son, Seung Uk , Lah, Myoung Soo , Chung, Taek-Mo

Article Issue Date2017-09 View21
Synthesis of new heteroleptic strontium complexes File

George, Sheby Mary , Kim, Hyo-Suk , Lah, Myoung Soo , Park, Bo Keun , Kim, Chang Gyoun , Chung, Taek-Mo

Article Issue Date2014-10 View17
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