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Atomic Layer Deposition of Epitaxial Ferroelectric Hf0.5Zr0.5O2 Thin Films File

Cho, Jung Woo , Song, Myeong Seop , Choi, In Hyeok , Go, Kyoung-June , Han, Jaewoo , Lee, Tae Yoon , An, Chihwan , Choi, Hyung-Jin , Sohn, Chang Hee , Park, Min Hyuk , et al

Article Issue Date2024-06 View191
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