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Effect of the Bottom Electrode Contact (BEC) on the phase transformation of N2 doped Ge2Sb2Te5 (N-GST) in a Phase-change Random Access Memory

Lee, S. , Song, Y.J. , Hwang, Y.N. , Lee, S.H. , Park, J.H. , Ryoo, K.C. , Ahn, S.J. , Jeong, Changwook , Oh, J.H. , Shin, J.M. , et al

Conference Paper Issue Date2005-11-30 View75
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