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Enhanced ferroelectric switching speed of Si-doped HfO2 thin film tailored by oxygen deficiency File File

Lee, Kyoungjun , Park, Kunwoo , Lee, Hyun-Jae , Song, Myeong Seop , Lee, Kyu Cheol , Namkung, Jin , Lee, Jun Hee , Park, Jungwon , Chae, Seung Chul

Article Issue Date2021-03 View125
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